Surface and interface analysis with medium energy ion scattering.

Quantitative considerations in medium energy ion scattering depth profiling analysis of nanolayers

The high depth resolution capability of medium energy ion scattering (MEIS) is becoming increasingly relevant to the characterisation of nanolayers in e.g. microelectronics. In this paper we examine the attainable quantitative accuracy of MEIS depth profiling. Transparent but reliable analytical calculations are used to illustrate what can ultimately be achieved for dilute impurities in a silic...

Direct observation and theory of trajectory-dependent electronic energy losses in medium-energy ion scattering.

The energy spectrum associated with scattering of 100 keV H+ ions from the outermost few atomic layers of Cu(111) in different scattering geometries provides direct evidence of trajectory-dependent electronic energy loss. Theoretical simulations, combining standard Monte Carlo calculations of the elastic scattering trajectories with coupled-channel calculations to describe inner-shell ionizatio...

Low-energy ion beamline scattering apparatus for surface science investigations

We report on the design, construction, and performance of a high current monolayers/ s , mass-filtered ion beamline system for surface scattering studies using inert and reactive species at collision energies below 1500 eV. The system combines a high-density inductively coupled plasma ion source, high-voltage floating beam transport line with magnet mass-filter and neutral stripping, decelerato...

Damage formation and annealing studies of low energy ion implants in silicon using medium energy ion scattering

Scattering Lengths and Medium and High Energy ππ Scattering

Medium and high energy absorptive parts contribute to dispersive expressions for Dwave scattering lengths, a2 and a 2 2. For the model employed by Basdevant, Frogatt and Peterson we find the Dwave driving term contributions to the Dwave scattering lengths are 1.8 · 10−4 to a2 and 0.4 · 10 −4 to a2, roughly 10% and 30% of their respective central experimental values. Inequivalent sets of sum rul...